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TECHNOLOGY SIMULATION - Fraunhofer
WebApr 1, 2009 · Dr. LiTHO [5] offers fast and accurate continuum simulation of all the lithographic steps (Fig. 1).Software modules for different lithographic process steps are implemented in C/C++, and FORTRAN, respectively. The modern open source programming language Python is used to combine these modules, to provide an easy … WebDr. LiTHO (Fraunhofer IISB): http://www.drlitho.com//cms/website.php FullChip (Panoramic Technology Inc.): http://panoramictech.com/ LAVA (UC Berkeley): … novalis ratchet and clank
Impact of alternative mask stacks on the imaging performance at …
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